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Semiconductor Process Laboratory

Laboratory Name : Semiconductor Process Laboratory
Supervisor : Nian Yung-Tang
Co-Supervisor : Fang Chao-Hsun
Research Areas :

In recent years, with the rapid development of high-tech industries, the demand for professionals in materials processing and analysis has significantly increased. This Semiconductor Process Laboratory was established to meet the training needs of the semiconductor industry.
This laboratory provides facilities for semiconductor process experimental teaching and semiconductor process research.

Major Equipment :  
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Electrode Evaporation System
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Rapid Thermal Annealing System
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Rapid Thermal Annealing System
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Fume Hood
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Internal Circulation Chemical Cabinet
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Vacuum Chamber
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I-V Curve Measurement System
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Hall Effect Measurement System
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Four-Point Probe Measurement System
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Electrolytic Tungsten Probe Measurement System
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Surface Roughness Measurement System